000			03089cam a22004574a 4500
001			16786538
003			OSt
005			20150408114059.0
008			110519s2012 flua b 001 0 eng
010			_a 2011014406
020			_a9781420055115 (v. 1)
020			_a1420055119 (v. 1)
020			_a9781420055191 (v.2)
020			_a1420055194 (v.2)
020			_a9781420055160 (v.3)
020			_a142005516X (v.3)
035			_a(OCoLC)ocn727047810
040			_aDLC _cDLC _dYDX _dYDXCP _dCDX _dCOO _dMYPMP _dDLC
042			_apcc
050	0	0	_aTK7875 _b.M33 2012
082	0	0	_a620.5 _223 _bMMF
084			_aTEC027000 _aTEC008070 _aSCI077000 _2bisacsh
100	1		_aMadou, Marc J. _917171
245	1	0	_aFundamentals of microfabrication and nanotechnology. _pSolid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / _cMarc J. Madou.
246	3	0	_aSolid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
250			_a3rd ed.
260			_aBoca Raton, FL : _bCRC Press, _cc2012.
300			_a3 v. : _bill. (some col.) ; _c29 cm.
504			_aIncludes bibliographical references and index.
505	0		_av. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
520			_a"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--
520			_a"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--
650		0	_aMicroelectromechanical systems. _917172
650		0	_aNanoelectromechanical systems. _917173
650		0	_aMicrofluidics. _912206
650		0	_aSolid state physics. _917174
856			_uhttp://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486 _zClick to ask Cornell University Library to RUSH purchase. We will contact you by email when it arrives (typically within a week).
906			_a7 _bcbc _corignew _d1 _eecip _f20 _gy-gencatlg
942			_2ddc _cDVD
999			_c25939 _d260439