@book{32035,
	author = {Weste, Neil H. E and McGraw Hill Book Company.},
	title = {Integrated circuit processes.},
	publisher = {Pearson/Addison-Wesley},
	year = {2011},
	series = {McGraw-Hill course in continuing education for electronics engineers ; [1]},
	address = {Boston :},
	edition = {4th ed.}
}