Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology Madou, Marc J. creator text bibliography flu Boca Raton, FL CRC Press c2012 2012 3rd ed. monographic eng

print

3 v. : ill. (some col.) ; 29 cm. "Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"-- "In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"-- v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications. Marc J. Madou. Includes bibliographical references and index. Microelectromechanical systems Nanoelectromechanical systems Microfluidics Solid state physics TK7875 .M33 2012 620.5 MMF TEC027000 TEC008070 SCI077000 9781420055115 (v. 1) 1420055119 (v. 1) 9781420055191 (v.2) 1420055194 (v.2) 9781420055160 (v.3) 142005516X (v.3) 2011014406 http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486 http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486 DLC 110519 20150408114059.0 16786538