03089cam a22004574a 4500 16786538 OSt 20150408114059.0 110519s2012 flua b 001 0 eng 2011014406 9781420055115 (v. 1) 1420055119 (v. 1) 9781420055191 (v.2) 1420055194 (v.2) 9781420055160 (v.3) 142005516X (v.3) (OCoLC)ocn727047810 DLC DLC YDX YDXCP CDX COO MYPMP DLC pcc TK7875 .M33 2012 620.5 23 MMF TEC027000 TEC008070 SCI077000 bisacsh Madou, Marc J. 17171 Fundamentals of microfabrication and nanotechnology. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology 3rd ed. Boca Raton, FL : CRC Press, c2012. 3 v. : ill. (some col.) ; 29 cm. Includes bibliographical references and index. v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications. "Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"-- "In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"-- Microelectromechanical systems. 17172 Nanoelectromechanical systems. 17173 Microfluidics. 12206 Solid state physics. 17174 http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486 Click to ask Cornell University Library to RUSH purchase. We will contact you by email when it arrives (typically within a week). 7 cbc orignew 1 ecip 20 y-gencatlg ddc DVD 25939 260439 0 2013-03-10 0 0 620.5 MMF v1 2012-09-17 CL 00400023 CL 2013-03-10 00:00:00 BOOK ddc 0 0 2013-03-10 0 0 620.5 ,. MMF v2 2012-09-18 CL 00400024 CL 2013-03-10 00:00:00 BOOK ddc 0 0 2013-03-10 0 0 620.5 MMF v3 2012-12-23 CL 00400979 CL 2013-03-10 00:00:00 BOOK ddc 0 0 2013-03-10 0 0 620.5 MMF v2 2012-12-23 CL 00400978 CL 2013-03-10 00:00:00 BOOK ddc 0 0 2013-03-10 0 0 620.5 MMF v1 2012-12-23 CL 00400977 CL 2013-03-10 00:00:00 BOOK ddc 0 0 2013-03-10 0 0 620.5 MMF v3 2012-12-23 CL 00400976 CL 2013-03-10 00:00:00 BOOK ddc 0 0 2013-03-10 0 0 620.5 MMF v2 2012-12-23 CL 00400975 CL 2013-03-10 00:00:00 BOOK ddc 0 0 2013-03-10 0 0 620.5 MMF v1 2012-12-23 CL 00400974 CL 2013-03-10 00:00:00 BOOK ddc 0 0 2013-12-13 0 0 620.5 MMF 2013-12-13 SHM 00453162 SHM 2013-12-13 00:00:00 BOOK ddc 0 0 2013-12-13 0 0 620.5 MMF 2013-12-13 SHM 00453163 SHM 2013-12-13 00:00:00 BOOK ddc 0 0 2013-12-13 0 0 620.5 MMF 2013-12-13 SHM 00453164 SHM 2013-12-13 00:00:00 BOOK ddc 0 0 2013-12-13 0 0 620.5 MMF 2013-12-13 SZM 00453165 SZM 2013-12-13 00:00:00 BOOK ddc 0 0 2013-12-13 0 0 620.5 MMF 2013-12-13 SZM 00453166 SZM 2013-12-13 00:00:00 BOOK ddc 0 0 2013-12-13 0 0 620.5 MMF 2013-12-13 SZM 00453167 SZM 2013-12-13 00:00:00 BOOK ddc 0