@book{25939,
	author = {Madou, Marc J.},
	title = {Fundamentals of microfabrication and nanotechnology.},
	publisher = {CRC Press,},
	year = {c2012.},
	address = {Boca Raton, FL :},
	edition = {3rd ed.},
	url = {http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486}
}